| Authentic | True |
| Event | Semiconductor Process and Characterization |
| Name | L. Ananda Shruthi |
| Date | January 8-19, 2024 |
| Organization | Applied Materials India Private Limited |
| Coordinator | Prof. Saurabh Lodha |
| Dean | Prof. Siddhartha Ghosh |
Course Content
- Overview of Semiconductor Industry
- CMOS process integration
- Thin Film deposition
- CMP, Etch, Ion Implantation
- Lithography
- Film thickness metrology: Ellipsometry, Reflectometry
- Composition metrology: XPS, SIMS, RBS
- Structure metrology: XRD/XRR
- Thin film microscopy: SEM, TEM, AFM